Standardization
図面
We have updated the drawings for the sample holders; the 3D CAD files are here.(stp ,jpg, pdf)。(2024/3/08)
Communication protocols for synthesis, analysis, and measurement modules are now available. (In cooperation with Tectos Co., Ltd.)(2022/3/19)
A stl file for printing sample holders using a 3D printer is now available.(2022/3/3)
Drawings of the cluster system at Hitosugi & Shimizu Laboratory (prepared by Pascal Co., Ltd.)
3D CAD files for sample holder are available. (stp ,jpg, pdf)
Please contact Hitosugi(hitosugi -at- g.ecc.u-tokyo.ac.jp) for further information.
Module-to-Cluster chamber connection format
Sample Holder(NEW!)
BJ1702-001E holder assembly diagram
BJ1702-500A10 substrate holder
BJ1702-500A □10 substrate holder
Downloading and viewing with PDF-viewing software is recommended
BJ1702-501A mask holder
BJ1702-502 mask for full surface deposition
BJ1702-503 soaking plate
BJ1702-504 mask for Hall-bar electrode deposition
BJ1702-505 mask for Hall-bar deposition
BJ1702-506 pin1
BJ1702-507A pin2
BJ1702-508 solder stage
